Cabot Microelectronics Corporation, the world's leading supplier of chemical mechanical planarization (CMP) slurries to the semiconductor industry, announced that today it filed a legal action against DuPont Air Products NanoMaterials LLC (DA Nano) for DA Nano's manufacture and marketing of certain CMP slurries that infringe patents owned by Cabot Microelectronics. The affected DA Nano products include those used for tungsten CMP. As explained in Cabot Microelectronics' December 12, 2006 press release on the matter, Cabot Microelectronics filed its complaint as a counterclaim in response to an action filed by DA Nano in the United States District Court for the District of Arizona regarding some of the patents at issue.

Posted by GEN-ERIC at 01:46:41 am into the following categories: In The News

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